Micro/Nanofabrication

RESEARCH INFRASTRUCTURE

From Micro/Nanostructures
to Validated Devices

Simulation, fabrication and optoelectronic testing connect materials, structures, devices and application validation.

01 / LABORATORY

Laboratory & Facilities

Materials preparation, pattern fabrication, characterization and optoelectronic testing support collaborative research.

01Materials Preparation

Chemical Vapor Deposition System

Material growth and thin-film preparation for micro/nano optical structures.

02Optoelectronic Testing

Semiconductor Analysis & Test System

Electrical characterization and photoresponse testing connect sample preparation with performance evaluation.

03Spectral Analysis

FTIR Microspectrometer

Infrared spectroscopy and microscale analysis for material and device optical properties.

04Micro/Nanofabrication

Focused Ion Beam Direct-Writing System

Local micro/nanofabrication and sample preparation for structural research and process validation.

05Thin-Film Deposition

Magnetron Sputtering System

Functional thin-film deposition supporting material systems, device structures and fabrication workflows.

06Patterning & Characterization

SEM with Electron-Beam Direct Writing

Electron-beam patterning and microstructural imaging for micro/nano pattern development.

07Clean Process Environment

Cleanroom

A clean environment for sample preparation, process operations and experimental work.

08Precision Laser Processing

Femtosecond Laser Cutting System

Precision laser processing and cutting for sample preparation and structural fabrication.

02 / METALENS

Metalens Micro/Nanofabrication

Simulation, prototyping, imprinting and multiscale characterization of planar focusing lenses, beam-splitting DOEs and spectral filters.

Metalens Structures & Characterization
Metalens Structures & Characterization

Planar Focusing Lens

Planar micro/nanostructures for focusing and imaging, with optical microscopy, SEM, samples and test results.

Metalens Structures & Characterization
Metalens Structures & Characterization

Laser Beam-Splitting DOE

VCSEL-array beam shaping and splitting, from design and samples to measured optical spots.

Metalens Structures & Characterization
Metalens Structures & Characterization

Spectral Filter Structures

Multichannel spectral control using localized surface plasmon resonance.

Structures & Test Progress ↗

CONTACT

Technical Enquiries
& Collaboration.

Contact us for product selection, development
and project collaboration.

Get in Touch ↗
TECHNICAL COLLABORATIONBD@zhongkeyaoguang.com ↗

266 Fangzheng Avenue, High-tech Park, Liangjiang New Area, Chongqing, China

Zhongke Yaoguang (Chongqing) Optoelectronics Technology Co., Ltd.
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